Title:
SCRIBING WHEEL
Document Type and Number:
Japanese Patent JP2016210169
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a scribing wheel capable of generating a vertical crack nearly from a position, in which the "hook" characteristic is so excellent for a brittle material substrate of a high hardness that a vertical crack can be generated shortly from a position, at which a scribe was started.SOLUTION: An inclined plane having a V-shaped section and made of a single crystal diamond or a polycrystalline diamond is formed on the outer circumference of a scribing wheel, and the arithmetic average roughness Ra of the inclined plane is set at 0.01 μm or less. At the portion of a ridge line 13, in which inclined planes 14a and 14b intersect, there are formed grooves 15a and 15b of a constant pitch less than 8 μm. As a result, the "hook" characteristics can be improved in the scribing wheel made of diamond.SELECTED DRAWING: Figure 2
More Like This:
Inventors:
HAYASHI HIROYOSHI
Application Number:
JP2015243883A
Publication Date:
December 15, 2016
Filing Date:
December 15, 2015
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B28D5/00; C03B33/10; H01L21/301
Domestic Patent References:
| JP2015048260A | 2015-03-16 | |||
| JP2013202975A | 2013-10-07 | |||
| JP2015063010A | 2015-04-09 | |||
| JP2013112534A | 2013-06-10 |
Attorney, Agent or Firm:
Yoshiki Okamoto