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Title:
SEALING DEVICE
Document Type and Number:
Japanese Patent JP2011210831
Kind Code:
A
Abstract:

To provide a sealing device that cures an ultraviolet curing resin before curing, provided between a cover member and an element mounting member where a component element is mounted, under a vacuum, also improves productivity, and is made to be compact.

The sealing device includes: a mounting unit 112 configured to mount a workpiece in a state where the ultraviolet curing resin J before curing is sandwiched between the cover member WH and the element mounting member WT where the component element is mounted; a sealing chamber 110 in which the mounting unit 112 is provided; a closing unit 120 comprising an annular gasket 122 provided along an edge of an opening of the sealing chamber 110 and a transparent member 121 made of a material transmitting ultraviolet light, and configured to close the opening of the sealing chamber 110; an exhaust unit 140 connected to the sealing chamber 110 and configured to exhaust air in the sealing chamber; and an ultraviolet light irradiating unit 130 provided outside the sealing chamber 110 at a position opposite to the mounting unit across the transparent member and configured to emit ultraviolet light.


Inventors:
KOBAYASHI HIROKAZU
Application Number:
JP2010075352A
Publication Date:
October 20, 2011
Filing Date:
March 29, 2010
Export Citation:
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Assignee:
KYOCERA KINSEKI CORP
International Classes:
H01L23/10; H03H3/02
Domestic Patent References:
JP2000150142A2000-05-30
JP2006004708A2006-01-05
JPH0990377A1997-04-04
JP2010258274A2010-11-11
JP2006119286A2006-05-11
JPS62108946U1987-07-11