PURPOSE: To prevent the generation of blowholes by a method wherein a sealing jig is formed into a structure, wherein the constituent member of part of its main body is deformed due to its characteristics by heating, and is constituted in such a way that a pressing force is applied to a product pinched between pressing parts at a sealing temperature and the pressing force is released at a temperature lower than the sealing temperature.
CONSTITUTION: If a sealing substrate 18 is inserted in a heating furnace, gas G is generated from a resin layer 8 adhered on the surface of a semiconductor pellet 7 on the condition of a comparatively low temperature of 100°C or lower at the beginning of the insertion, but this gas is exhausted to the exterior from the contact part between a frame member 5 and a cap 12. If a heating is further increased and the heating temperature reaches the vicinity of a sealing temperature, a pressing force is applied between pressing pawls 15a and 15b due to a difference between the expansion coefficients of a clip main body 14 and a receiving member 16 and the member 5 and the cap 12 are brought in a closely adhered state. At this time, as most of the gas G is already exhausted to the exterior, the internal pressure in a cavity 4 is not increased, blowholes are never generated in a brazing metal 6, the member 5 and the cap 12 are closely adhered to each other and the hermetic seal of the cavity 4 is attained.
OKINAGA TAKAYUKI
SHIRAI MASAYUKI
OTSUKA KANJI
AKASAKI HIROSHI
HITACHI VLSI ENG