Title:
SECONDARY ELECTRON MULTIPLIER FOR COUNTING PULSE
Document Type and Number:
Japanese Patent JPH06139994
Kind Code:
A
Abstract:
PURPOSE: To provide a pulse counting secondary electron multiplier wherein a characteristic can be restored in a vacuum by providing a built-in baking device.
CONSTITUTION: By scanning an ion 1, obtained by mass spectrometry, in a pulse counting secondary electron maultiplier 2, a stain is generated in the inside of the second electron multiplier 2. In order to remove this stain in a vacuum, a heater 5 is built in the secondary electron multiplier 2, and by using the heater 5 when a characteristic is deteriorated, the characteristic can be regenerated in the vacuum.
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Inventors:
MIYATA TADAKIYO
Application Number:
JP28568392A
Publication Date:
May 20, 1994
Filing Date:
October 23, 1992
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J43/04; H01J43/24; (IPC1-7): H01J43/24; H01J43/04
Attorney, Agent or Firm:
Ogawa Katsuo