Title:
RF電力供給における2次周波数の終端
Document Type and Number:
Japanese Patent JP2008535318
Kind Code:
A
Abstract:
There is provided a secondary reactive termination circuit connected between the output of the RF power generator and the input of the plasma chamber to allow the tight regulation or limiting of the voltage and current components of the secondary frequencies within the process plasma. The secondary reactive circuit controls the impedance of the match network designed primarily to operate at the fundamental frequency of the RF power generator as seen by secondary frequencies in the system. Power delivery components are measured at the connection point of the termination circuit and used as feedback signals to control variable values of the termination circuit components.
Inventors:
Blackburn, Thomas Joel
Application Number:
JP2008503057A
Publication Date:
August 28, 2008
Filing Date:
March 17, 2006
Export Citation:
Assignee:
Advanced Energy Industries, Inc.
International Classes:
H03F1/56; C23C16/00; H01J7/24; H01J37/32; H03H7/38; H05H1/46; H01L
Domestic Patent References:
| JP2001007086A | 2001-01-12 | |||
| JPH02298024A | 1990-12-10 | |||
| JP2001525604A | 2001-12-11 | |||
| JP2002043286A | 2002-02-08 |
Foreign References:
| WO2005010938A2 | 2005-02-03 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita
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