Title:
二次純水製造装置
Document Type and Number:
Japanese Patent JP5135654
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a secondary pure water making apparatus not lowering water quality by metalic colloids or fine particles generated from a metalic material constituting a feed water pump, a heat exchange, or an UV irradiator or the secondary pure water making apparatus and capable of stably obtaining ultrapure water of high quality with a residual ion concentration of 10 ng/L or less. SOLUTION: A filter 20 having ion exchange capacity capable of removing fine particles with a particle size of 5 μm or more is arranged between the feed water pump 11 and UF film separator 15 of the secondary pure water making apparatus. Metal colloids or fine particles are efficiently collected and removed by this filter 20 and, even if the collected metal colloids or fine particles are ionized, they can be adsorbed by the ion exchange capacity of the filter 20 to be held. Therefore, the ion leak due to the metal colloids or fine particles is prevented and ultrapure water of high quality can be stably obtained.
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Inventors:
Koizumi
Application Number:
JP2001200992A
Publication Date:
February 06, 2013
Filing Date:
July 02, 2001
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
C02F1/44; B01D61/16; C02F1/32; C02F1/42; C02F9/00
Domestic Patent References:
| JP6079273A | ||||
| JP7195073A | ||||
| JP61167404A | ||||
| JP2293083A | ||||
| JP2280819A | ||||
| JP3293087A | ||||
| JP2017994A | ||||
| JP2222763A |
Attorney, Agent or Firm:
Tsuyoshi Shigeno