SECTIONAL FORM MEASURING APPARATUS

Title:

SECTIONAL FORM MEASURING APPARATUS

Document Type and Number:

Japanese Patent JP3900609

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To obtain a sectional form by a method wherein a correction value is obtained by a calibration means from a relationship between a first distance from the surface of an object to be inspected to a sensor and a difference signal of the sensor and then, is added to a second distance between a stage in which the actual surface of the object to be inspected is scanned to hold the difference signal of the sensor zero and the sensor to allow calibration according to the condition of the surface.
SOLUTION: Firstly, while stages 24 and 26b are driven to scan the top of the surface of an object to be inspected, a sensor device 20 is continuously driven in the direction of the Z axis so that a difference signal S from a 2-split sensor in the sensor device 20 is held in zero under a servo control in which the driving or controlling is performed by a control section 30. When the difference signal S from the sensor is 'zero', a distance between the object to be inspected and the device 20 is at a focusing distance. In the measurement of the sectional form, secondly, a moving distance in the direction of the Z axis of the sensor device 20 is detected by an encoder 21 as a degree displaced from a Z value. That is to say, the device 20 is always driven vertically to reach the focusing position along the direction of scanning and the Z value at the moment is sampled thereby measuring the sectional form of the surface of the object to be inspected.

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Inventors:

Yoshihiro Naganuma

Application Number:

JP23346497A

Publication Date:

April 04, 2007

Filing Date:

August 29, 1997

Export Citation:

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Assignee:

NIKON CORPORATION

International Classes:

G01B11/24; G01B11/30; G01C3/00; G01C3/06; G02B7/28; (IPC1-7): G01B11/24; G01B11/30; G02B7/28

Domestic Patent References:

JP589480A
JP989520A
JP6273166A

Attorney, Agent or Firm:

Kenji Doi
Hayashi Tsunetoku

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