Title:
自己位置合わせ型イオンガイド構造
Document Type and Number:
Japanese Patent JP3927178
Kind Code:
B2
Inventors:
Tong, Roger, Sea.
Application Number:
JP2003577298A
Publication Date:
June 06, 2007
Filing Date:
September 24, 2002
Export Citation:
Assignee:
Varian, Incorporated
International Classes:
H01J49/06; H01J49/10; H01J49/42
Domestic Patent References:
| JP4082152A | ||||
| JP59087743A | ||||
| JP2000268770A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki
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