PURPOSE: To provide an inexpensive semi-active damping device which enables damping by providing a semi-active damper device or a semi-active stiffness mechanism device on a damping device consisting of a structure subject to the step input in the horizontal direction and the floor vibration and a damping table, apart from a passive damping device.
CONSTITUTION: When the X-Y stage 4 is driven by its driving device, a reaction force is exerted on a level block 3 supporting the driving device, and a damping device 2 is deformed thereby. If an electro-magnet 14 is actuated immediately before the X-Y stage 4 is driven, a movable member 16 and the level block 3 are connected to each other, and a relative motion is generated between the movable member 16 and a container member 17, and the viscous resistance of the viscous fluid 18 to be generated when the viscous fluid 18 is removed performs the damping effect as a damper. In particular, when the higher the viscosity of the viscous fluid 18 becomes, and the narrower the space between the movable member 16 and the container member 17 becomes, the larger damping force is obtained, and if required, it is possible to provide the overdamping.
ISOYA HITOSHI
KOBAYASHI ISAO
OOTAKE IKUMORI
