SEMICONDUCTOR ACCELERATION SENSOR AND INSPECTING METHOD FOR THE SEMICONDUCTOR ACCELERATION SENSOR

Japanese Patent JP3876615

B2

PROBLEM TO BE SOLVED: To provide semiconductor acceleration sensor having high reliability at a low cost.
SOLUTION: A sensing element 1 has a weight part 5 rockably supported by a support part 16 via a thin-walled flexible part 4, and a gauge resistance 6 is formed on the flexible part 4. Upper and lower caps 2 and 3 are joined to the element 1, on its principal surface side and on its back surface side, respectively. The upper and lower caps 2 and 3 have recesses 2a and 3a, respectively formed in their surfaces confronting the element 1. An inspection mark 18, having a cruciform planar shape, is provided on a middle part of a surface of the weight part 5 facing on the recess 2a, and a circular inspection window 29, enabling the inspection mark 18 to be visually perceived, is bored through the upper cap 2. The distance from the inspection mark 18 to a reference plane, standing at a fixed distance from the principal surface of the support part 16, is measured by using an optical range finder, thus making it possible to judge bending or warping of the flexible part 4, based on the result of the measurement.

Hiroshi Saito
Takuro Ishida
Hironori Kami

JP2000359257A

February 07, 2007

November 27, 2000

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MATSUSHITA ELECTRIC WORKS,LTD.

G01P15/12; G01P21/00; G01P15/08; H01L29/84; (IPC1-7): G01P15/12; G01P15/08; G01P21/00; H01L29/84

JP7072169A
JP5102283A
JP8075783A
JP4075969U
JP57142363U
JP56003434U
JP7014380U

Keisei Nishikawa
Atsuo Mori

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