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Patent Searching and Data


Title:
SEMICONDUCTOR ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JPH05119057
Kind Code:
A
Abstract:

PURPOSE: To easily measure the sensitivity of a semiconductor acceleration sensor and, to easily adjust the sensor by providing a through hole in a sensor chip section facing the weight section of the sensor so that a load can be directly applied to the weight section.

CONSTITUTION: An upper and lower supporting bases 2 and 3 respectively having recesses 6 and 7 are put on the upper and lower surfaces of a sensor substrate 1 provided with a weight section 9 and flexible section 8. Then at least one or more through holes 5 are formed through the upper supporting base 2 at positions facing the weight section 9. Therefore, the output voltage of the sensor can be obtained by directly applying a load of a loading body to the section 9 through the hole 5.


Inventors:
YANO AKIHIRO
Application Number:
JP30278291A
Publication Date:
May 14, 1993
Filing Date:
October 23, 1991
Export Citation:
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Assignee:
NEC CORP
International Classes:
G01P15/12; G01P21/00; H01L29/84; (IPC1-7): G01P15/12; H01L29/84
Domestic Patent References:
JPH0221267A1990-01-24
Attorney, Agent or Firm:
Toshi Inoguchi