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Title:
Semiconductor device and its producing method
Document Type and Number:
Japanese Patent JP5928429
Kind Code:
B2
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Inventors:
Toru Yoshie
Application Number:
JP2013204999A
Publication Date:
June 01, 2016
Filing Date:
September 30, 2013
Export Citation:
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Assignee:
Sanken Electric Co., Ltd.
International Classes:
H01L21/336; H01L21/265; H01L21/28; H01L29/417; H01L29/78
Domestic Patent References:
JP2006173584A
JP2009182271A
JP2006024880A
JP9064346A
JP2000340520A
JP2003517204A
JP2006066438A
JP2002270838A
JP2013058601A
JP2009049198A
JP2006228901A
Attorney, Agent or Firm:
Shiroyuki Hori
Yukihiko Maejima



 
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