Title:
Semiconductor device and its producing method
Document Type and Number:
Japanese Patent JP6036609
Kind Code:
B2
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Inventors:
Satoshi Takada
Application Number:
JP2013177568A
Publication Date:
November 30, 2016
Filing Date:
August 29, 2013
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P21/00; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| JP2012141299A | ||||
| JP201237341A | ||||
| JP200074939A | ||||
| JP9260453A |
Foreign References:
| US20120167685 |
Attorney, Agent or Firm:
Patent Business Corporation Kaisei Patent Office