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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2008166442
Kind Code:
A
Abstract:

To provide a semiconductor device that reduces the interval of bit lines and increases storage capacity density easily, and to provide a manufacturing method of the semiconductor device.

The semiconductor device includes: a first bit line 14 provided on a substrate 10; an insulating layer 12 that is provided between the first bit lines 14 on the substrate 10 and has an upper surface higher than that of the first bit line 14; a channel layer 16 that is provided on both side faces of the insulating layer 12 and is connected to each first bit line 14; and a charge storage layer 22 provided on a side face that opposes a side face where the insulating layer 12 of the channel layer 16 is provided. The manufacturing method for the semiconductor device is also presented.


Inventors:
HAYAKAWA YUKIO
NANSEI HIROYUKI
Application Number:
JP2006353415A
Publication Date:
July 17, 2008
Filing Date:
December 27, 2006
Export Citation:
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Assignee:
SPANSION LLC
International Classes:
H01L21/8247; H01L27/115; H01L29/788; H01L29/792
Attorney, Agent or Firm:
Shuhei Katayama
Teruo Yokoyama