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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2009111222
Kind Code:
A
Abstract:

To provide a semiconductor device capable of preventing defects due to etching such as an increase in leakage current, a deterioration in coating properties, and a deterioration in transistor characteristics, and to provide a method of manufacturing the same.

A CMOS transistor 500 includes an N-type MOS transistor having a gate electrode 202 and a P-type MOS transistor having a gate electrode 201 on the same semiconductor substrate 1. The gate electrode 202 includes a gate insulating film 5, a polycrystalline silicon layer 61, a metal layer 62, and a polycrystalline silicon layer 63. The gate electrode 201 includes the gate insulating film 5, the metal layer 62, and the polycrystalline silicon layer 63.


Inventors:
TSUKAMOTO KAZUHIRO
Application Number:
JP2007283028A
Publication Date:
May 21, 2009
Filing Date:
October 31, 2007
Export Citation:
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Assignee:
RENESAS TECH CORP
International Classes:
H01L21/8238; H01L21/8234; H01L27/088; H01L27/092; H01L29/423; H01L29/49
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita