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Title:
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2013197266
Kind Code:
A
Abstract:

To provide a semiconductor device and a method of manufacturing the same, capable of assuring an enough formation region for a wide fringe pattern even if a space between adjoining wirings is smaller.

A semiconductor device includes wirings. The 3n+1 wiring extends between the 3n wiring and the 3n+2 wiring, and the 3n, 3n+1, and 3n+2 wirings are formed in a group. A first fringe pattern is positioned at an end part of the 3n wiring and is formed with a line thicker than that of the 3n wiring. A second fringe pattern is positioned at an end part of the 3n+1 wiring, and is formed in a line thicker than that of the 3n+1 wiring. A third fringe pattern is positioned at an end part of the 3n+2 wiring and is formed in line thicker than that of the 3n+2 wiring. An arrangement region of the second fringe pattern is provided on a near side than the end part of each wiring where the first fringe pattern and the third fringe pattern are arranged.


Inventors:
SATO YUICHI
NAGASHIMA MASASHI
Application Number:
JP2012061972A
Publication Date:
September 30, 2013
Filing Date:
March 19, 2012
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/8247; H01L21/3213; H01L21/336; H01L21/768; H01L27/10; H01L27/115; H01L29/788; H01L29/792
Attorney, Agent or Firm:
Patent Business Corporation Sato International Patent Office



 
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