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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2013254815
Kind Code:
A
Abstract:

To reduce variation in the wiring resistance of first wiring by reducing variation in the film thickness of the first wiring above a second active region.

A semiconductor device includes: a memory cell region having a first element isolation region and a first active region provided so as to be partitioned by the first element isolation region; a peripheral region having a second element isolation region and a second active region partitioned by the first and second element isolation regions and protruding to top surfaces of the first and second element isolation regions; and first wiring buried in a semiconductor substrate in the memory cell region and the peripheral region so as to extend in a first direction above the first and second active regions. The width of the second active region in the first direction is constant.


Inventors:
OTA YOHEI
Application Number:
JP2012128828A
Publication Date:
December 19, 2013
Filing Date:
June 06, 2012
Export Citation:
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Assignee:
PS4 LUXCO SARL
International Classes:
H01L21/8242; H01L21/336; H01L27/108; H01L29/78
Attorney, Agent or Firm:
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata