Title:
半導体装置
Document Type and Number:
Japanese Patent JP5259671
Kind Code:
B2
Inventors:
Kazutoshi Nakamura
Norio Yasuhara
Norio Yasuhara
Application Number:
JP2010227297A
Publication Date:
August 07, 2013
Filing Date:
October 07, 2010
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/8234; H01L21/822; H01L27/04; H01L27/088; H02M3/155
Domestic Patent References:
| JP3225952A | ||||
| JP3278570A | ||||
| JP2106960A | ||||
| JP2006333595A | ||||
| JP2007228711A |
Attorney, Agent or Firm:
Masahiko Hinataji
Previous Patent: JPS5259670
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