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Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6114434
Kind Code:
B2
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Inventors:
Fujio Masuoka
Hiroki Nakamura
Application Number:
JP2016085187A
Publication Date:
April 12, 2017
Filing Date:
April 21, 2016
Export Citation:
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Assignee:
Unisantis Electronics Singapore Pte Ltd.
International Classes:
H01L21/336; H01L21/28; H01L21/8238; H01L27/092; H01L29/41; H01L29/423; H01L29/49; H01L29/78
Domestic Patent References:
JP2013503471A
JP2008172164A
JP2009182317A
Foreign References:
US6891234
WO2011024152A1
WO2009096470A1
Attorney, Agent or Firm:
Takaki Nishijima
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi



 
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