Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6146357
Kind Code:
B2
Inventors:
Go Nishiwaki
Application Number:
JP2014067995A
Publication Date:
June 14, 2017
Filing Date:
March 28, 2014
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
H01L21/28; C22C21/00; C23C10/00; H01L21/285
Domestic Patent References:
| JP53023562A | ||||
| JP4313233A | ||||
| JP4196316A | ||||
| JP2010278439A |
Attorney, Agent or Firm:
Kaiyu International Patent Office