Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH04170023
Kind Code:
A
Abstract:

PURPOSE: To prevent stress from being accumulated at a contact part and prevent deterioration of a characteristic value by partially covering a part above the contact part between an impurity diffusion region and an Al wire with an insulation film which is made of a softer material than a cover film.

CONSTITUTION: A p-type base region 2 consisting of a diffusion layer 3 and an n-type emitter region 3 are formed on a silicon substrate 1 and this n-type emitter region 3 is connected electrically and physically to an Al wire 5 which is formed on an insulation film through a contact hole. Then, a part above this emitter/contact part 4 is in a cover structure where it is partially covered with a material, for example a silicon oxide film 6, which is softer than a material of a cover film 7 which covers an entire chip surface, thus enabling stress which is accumulated at the contact part to be relaxed and deterioration of characteristics to be restricted.


Inventors:
SATSUNAI TAKASHIGE
Application Number:
JP29740290A
Publication Date:
June 17, 1992
Filing Date:
November 02, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NEC CORP
International Classes:
H01L21/28; H01L21/283; H01L21/316; H01L21/3205; H01L23/52; (IPC1-7): H01L21/28; H01L21/283; H01L21/316; H01L21/3205
Attorney, Agent or Firm:
Uchihara Shin



 
Previous Patent: スプレーノズル

Next Patent: PLASMA TREATMENT