Title:
マイクロアクチュエータを有する半導体一体型慣性センサ
Document Type and Number:
Japanese Patent JP5007002
Kind Code:
B2
Abstract:
The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).
Inventors:
Sarah zelvini
Benedetto Bigugna
Massimo Gala Bagulha
Genreka tomeshi
Benedetto Bigugna
Massimo Gala Bagulha
Genreka tomeshi
Application Number:
JP2000272251A
Publication Date:
August 22, 2012
Filing Date:
September 07, 2000
Export Citation:
Assignee:
STMicroelectronics S.r.l.
International Classes:
G01P15/125; B81B3/00; G01P15/00; G01P15/097; G01P15/10; G01P21/00; H01L29/84
Domestic Patent References:
| JP10047972A | ||||
| JP5248875A | ||||
| JP6018551A | ||||
| JP8159777A | ||||
| JP7091958A |
Foreign References:
| WO1997002467A1 |
Attorney, Agent or Firm:
Hidesaku Yamamoto