Title:
半導体製造装置
Document Type and Number:
Japanese Patent JP4138057
Kind Code:
B2
Inventors:
Yukio Ozaki
Naoki Tagashi
Nunozawa Reizou
Naoki Tagashi
Nunozawa Reizou
Application Number:
JP25498A
Publication Date:
August 20, 2008
Filing Date:
January 05, 1998
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
G05B23/02; G08B21/00; G08B23/00; H01L21/02; H01L21/677; H01L21/68
Domestic Patent References:
| JP6261166A | ||||
| JP8133681A | ||||
| JP9016215A | ||||
| JP5260605A | ||||
| JP9070487A |
Attorney, Agent or Firm:
Hideo Akazawa
Mitsue Haba
Hisako Ishido
Moto Ishido
Mitsue Haba
Hisako Ishido
Moto Ishido