SEMICONDUCTOR OPTICAL MODULATOR AND METHOD FOR MANUFACTURING THE SAME

Japanese Patent JP3927940

B2

PROBLEM TO BE SOLVED: To provide a semiconductor optical modulator of which the waveguide structure is prevented from being mechanically damaged and a method for manufacturing the same.
SOLUTION: The semiconductor optical modulator 1 is equipped with a substrate 3, a modulation element part 4, metallic wiring 31, air bridge wiring 33 and a protection post part 9. The protection post part 9 consists of a first part 41 and a second part 43. The first part 41 is formed in the same step as that for the modulation element part 4 and is composed of the same material as that of the modulation element part 4. Also the second part 43 is formed in the same step as that for the metal wiring 31 and is composed of the same material as that of the metallic wiring 31. The protection post part 9 is formed so as to have height from a principal plane 3a higher than the modulation element part 4 and the air bridge wiring 33. Thereby, in grinding the rear face of a wafer 151, the modulation element part 4 and the air bridge wiring 33 are prevented from being brought into contact with a wafer supporting substrate 141.

JPS59116612	LIGHT MODULATOR
JPH05173199	NON-LINEAR OPTICAL DEVICE
WO/2006/020701	LOW LOSS CONTACT STRUCTURES FOR SILICON BASED OPTICAL MODULATORS AND METHODS OF MANUFACTURE

Fukushi Earth
Ryuji Masuyama
Nakashima Shigeru
Haruhisa Akita

JP2003347391A

June 13, 2007

October 06, 2003

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Sumitomo Electric Industries, Ltd.
Phibest Co., Ltd.

G02F1/015; G02F1/025; (IPC1-7): G02F1/025

JP2000058965A
JP2000081522A
JP3263388A

Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Masatoshi Shibata

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