Title:
SEMICONDUCTOR PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH04370726
Kind Code:
A
Abstract:
PURPOSE:To obtain a semiconductor pressure sensor which is highly reliable when it is used for measurement of pressure wherein a contaminated liquid, a liquid having in itself the possibility of contaminating a piezo resistance gage, or the like, is used as a pressure medium, and which can be constructed to be small in size and inexpensive. CONSTITUTION:A pressure-sensitive chip 23 is provided on a base 21 with a pedestal 22 interposed, and an external connection terminal 25 is connected to this pressure-sensitive chip 23 through a lead wire 24. In the base 21 and the pedestal 22, a through hole communicating with a pressure introducing pipe 26 is formed. The upper side in the figure of the base 21, the pedestal 22, the pressure-sensitive chip 23 and the lead wire 24 are covered with a can 27, and the external connection terminal 25 is led outside through the base 21. The pressure-sensitive chip 23 forms a diaphragm part of which the shape changes in accordance with a pressure and a piezo resistance gage is formed on the surface of the part. In the part of the through hole provided in the base 21 and the pedestal 22, fluorosilicone gel 28 is provided.
Inventors:
ITO TATSUYA
Application Number:
JP17431591A
Publication Date:
December 24, 1992
Filing Date:
June 19, 1991
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
G01L9/04; G01L9/00; (IPC1-7): G01L9/04
Attorney, Agent or Firm:
Itami Masaru