To provide a semiconductor single crystal pulling device with which work efficiency at the time of initial setup or the maintenance can be improved and which can be miniaturized, and to provide its line configuration.
The turning means for a main chamber 4 having a magnet 7 of an approximately horseshoe-shape in a top view at the outer peripheral part is constituted of a first column 31 which is erected in the vicinity of one edge side of the opening end of the magnet 7 and a supporting member 37 which is provided at the first column 31 so that the main chamber 4 can be elevated or lowered in the opening part 7a of the magnet 7 when it is elevated or lowered at a crystal pulling position A. An elevating/lowering means and a turning means for evacuating a furnace chamber 6 to a position B where a crystal is taken out are arranged at a side face part of the magnet 7.
KODAMA YOICHI
SUGITA FUMITADA
KOMATSU DENSHI KINZOKU KK
| JPH11199366A | 1999-07-27 | |||
| JPH10182280A | 1998-07-07 | |||
| JPS6036391A | 1985-02-25 | |||
| JPH08188493A | 1996-07-23 |