Title:
SEMICONDUCTOR STORAGE CONTAINER OPENING/CLOSING DEVICE
Document Type and Number:
Japanese Patent JP2006216992
Kind Code:
A
Abstract:
To provide a semiconductor storage container opening/closing device capable of preventing foreign matter from entering a storage container and reducing the foreign matter from being attached to a wafer when the storage container is opened by using the storage container opening/closing device.
In the semiconductor storage container opening/closing device 100, the maximum opening speed of the semiconductor storage container is designed to be set to speed differential pressure ratio divided by a differential pressure between the internal pressure of a semiconductor manufacturing device and an external pressure outside the device, which is 0.06 (m/s×Pa) or less.
Inventors:
KOBAYASHI YOSHIAKI
KOBAYASHI HIDE
TOKUNAGA KENJI
KATO KOJI
MINAMI TERUO
KOBAYASHI HIDE
TOKUNAGA KENJI
KATO KOJI
MINAMI TERUO
Application Number:
JP2006139665A
Publication Date:
August 17, 2006
Filing Date:
May 19, 2006
Export Citation:
Assignee:
RENESAS TECH CORP
HITACHI PLANT TECHNOLOGIES LTD
HITACHI PLANT TECHNOLOGIES LTD
International Classes:
H01L21/677; B65G49/00
Attorney, Agent or Firm:
Yamato Tsutsui