Title:
半導体テストシステム
Document Type and Number:
Japanese Patent JP4249402
Kind Code:
B2
Abstract:
A power source current measurement unit provided in a semiconductor test system measures a power source current of a device under test with high speed and accuracy. The power source measurement unit includes a DA converter for generating a source voltage, an operational amplifier for supplying a power source current to the device under test, a voltage amplifier for amplifying a voltage representing the amount of power source current supplied to the device under test, an integration circuit for accumulating an output signal of the voltage amplifier for a predetermined integration time, and an AD converter for converting an output signal of the integration circuit to a digital signal after the integration time.
Inventors:
Shigeru Sugamori
Application Number:
JP2001089520A
Publication Date:
April 02, 2009
Filing Date:
March 27, 2001
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/26; G01R31/28; G01R31/319; G01R31/3183; G01R31/30
Domestic Patent References:
| JP63135881A | ||||
| JP7072205A | ||||
| JP5059332U | ||||
| JP6094796A | ||||
| JP6094798A | ||||
| JP48097575A | ||||
| JP2001522461A | ||||
| JP9145798A |
Foreign References:
| US5930735 | ||||
| US5917331 |
Attorney, Agent or Firm:
Kihei Watanabe