To provide a hydrogen adsorption detecting sensor and a hydrogen adsorption detector which are compact, and improve the degree of freedom in a design and a measurement.
The hydrogen adsorption detecting sensor 1 includes at least a substrate 2 having a light receiving surface 2a for entering and reflecting a light and a palladium thin film layer 4 provided on the light receiving surface 2a. The palladium thin film layer 4 or the substrate 2 forms a grating. The palladium thin film layer 4 adsorbs a hydrogen molecule. It is preferable that the grating is formed by a plurality of parallel rectangular grooves. It is preferable that a pitch of the grating is 1-2 μm. It is preferable that a layer thickness of the palladium thin film layer 4 is 1-20 nm. At least one inner thin film layer 3 is additionally provided between the palladium thin film layer 4 and the substrate 2. It is preferable that the inner thin film layer 3 contains silver, copper or aluminum.
SANO YOSUKE
SHINPO KAZUNARI
KATO KEIZO
KANEKO SODAN
| JPH06501546A | 1994-02-17 | |||
| JP2003121350A | 2003-04-23 | |||
| JP2006308511A | 2006-11-09 | |||
| JP2001516020A | 2001-09-25 | |||
| JP2005017155A | 2005-01-20 | |||
| JP2002267669A | 2002-09-18 |
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