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Patent Searching and Data


Title:
SENSOR
Document Type and Number:
Japanese Patent JP2012189332
Kind Code:
A
Abstract:

To provide a sensor that is capable of improving signal strength and detection sensitivity of SAW (Surface Acoustic Waves) and ensuring high operation reliability over a long period of time, and that has a simple structure.

A sensor comprises: a package 13 including a piezoelectric substrate 11 that is formed in the shape of a flat plate and a sealing substrate 12 that is jointed to one surface of the piezoelectric substrate and defines a cavity hermetically sealed between the piezoelectric substrate and the sealing substrate; an IDT (Inter Digital Transducer) 16 that is formed on one surface of the piezoelectric substrate and is arranged inside the cavity; external connection electrodes that are formed on at least one of the piezoelectric substrate and the sealing substrate and are conducted to the IDT through extraction electrodes; and a plate substrate 61 that is jointed to the other surface of the piezoelectric substrate. The piezoelectric substrate has a displacement part that is displaced according to a dynamic quantity affected from the outside of the package 13, and the plate substrate is formed with an opening part E that exposes the displacement part.


Inventors:
KIMURA FUMIO
ARAOGI MASATAKA
Application Number:
JP2011050673A
Publication Date:
October 04, 2012
Filing Date:
March 08, 2011
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
G01L9/08; B60C23/04; G01L1/00; G01L17/00
Domestic Patent References:
JP2007333500A2007-12-27
JPS55101028A1980-08-01
Foreign References:
US0006008A1849-01-09
Attorney, Agent or Firm:
久原 健太郎
内野 則彰
木村 信行