Title:
センサ及び電気装置
Document Type and Number:
Japanese Patent JP7456988
Kind Code:
B2
Abstract:
According to one embodiment, a sensor includes a base including a first face including a first face region, and a first structure body fixed to the first face region. The first structure body includes a first support portion fixed to the first face region, a second support portion fixed to the first face region, a first movable portion, and a first fixed electrode fixed to the first face region. The first movable portion is supported by the first and second support portions and apart from the base in a first direction crossing the first face region. The first movable portion includes a first movable electrode facing the first fixed electrode, and a first conductive member. A first current flows the first conductive member along a second direction crossing the first direction. A first gap is provided between the first fixed electrode and the first movable portion.
Inventors:
Hiroaki Yamazaki
Application Number:
JP2021149811A
Publication Date:
March 27, 2024
Filing Date:
September 15, 2021
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01R15/16; G01R19/00
Domestic Patent References:
| JP2006138852A | ||||
| JP2002168884A | ||||
| JP2017525957A | ||||
| JP2000338143A |
Foreign References:
| US20150183632 | ||||
| WO2016175142A1 | ||||
| US20160139173 |
Attorney, Agent or Firm:
Patent Attorney Firm iX