Title:
SHEET CARRYING AND PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP3790562
Kind Code:
B2
Abstract:
PURPOSE: To provide a sheet carrying and processing device capable of improving operability while keeping sheet processability.
CONSTITUTION: An etching machine as a sheet carrying and processing device is provided with a lower side roll group R1 formed by arraying rolls 5 having a plurality of disk 8 and an upper side roll group R2 formed by arraying rolls 6 in the upper side thereof. Etching liquid is jetted from a spray nozzle 11 as a supply port constituting a part of a fluid supplying means to a copper- plated laminate plate 3 as a sheet during carrying. The disks 8 of the lower side roll group R1 are arranged in a zigzag manner along the arraying direction A1 of the rolls 5. The disks 8 of the rolls 5 and 6 and the disks 8 of the other rolls 5 and 6 existing in the vicinity thereof are arranged by shifting these from one another so as to prevent these from being placed on the same straight line L1 extending in the arraying direction A1. The disks 8 and the spray nozzle 11 positioned in the end of the copper-plated laminate plate 3 are arranged relatively densely compared with the center part of the copper-plated laminate plate 3.
Inventors:
Ryo Matsuno
High Tetsuji Tada
Takahashi Dosho
High Tetsuji Tada
Takahashi Dosho
Application Number:
JP7792695A
Publication Date:
June 28, 2006
Filing Date:
April 03, 1995
Export Citation:
Assignee:
IBIDEN CO.,LTD.
International Classes:
B65G13/04; B65G39/04; C23F1/08; H01L21/306; H01L21/677; H01L21/68; H05K3/06; (IPC1-7): B65G13/04; B65G39/04; H01L21/306; H01L21/68; H05K3/06
Domestic Patent References:
| JP4048086A | ||||
| JP62202087A | ||||
| JP6081174A |
Attorney, Agent or Firm:
Hironobu Onda