Title:
シート状プラズマの発生装置
Document Type and Number:
Japanese Patent JP4982783
Kind Code:
B2
Abstract:
The invention relates to a device for the production of a plasma (16) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator (4) of microwave energy, one of the ends of which is connected to a production source (7) of microwave energy, the other end (8) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall (3) of the housing, each applicator (4) having a central core (5) which is essentially flush with the wall of the housing. The central core and the thickness of the wall (3) of the housing are separated by a space (6) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (14), such that said material is essentially flush with the level of the wall of the housing.
Inventors:
Thierry, Leon, Lagarde
Anna, Lacoste
Jack, Peltier
Eve, Alban-Marie, Arnal
Anna, Lacoste
Jack, Peltier
Eve, Alban-Marie, Arnal
Application Number:
JP2004509993A
Publication Date:
July 25, 2012
Filing Date:
June 03, 2003
Export Citation:
Assignee:
BOREAL PLASMAS
International Classes:
H05H1/46; C23C16/511; H01J27/16; H01J37/08; H01J37/32
Domestic Patent References:
| JP10074733A | ||||
| JP7135093A | ||||
| JP2001035695A | ||||
| JP8315998A | ||||
| JP2000174009A | ||||
| JP7302693A | ||||
| JP2001203098A | ||||
| JP9148097A | ||||
| JP10172789A | ||||
| JP3191068A | ||||
| JP2132798A | ||||
| JP7122399A | ||||
| JP2001250810A | ||||
| JP2001308071A | ||||
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| JP2002329709A |
Attorney, Agent or Firm:
Hirohito Katsunuma
Yasukazu Sato
Yasushi Kawasaki
Takeshi Sekine
Akaoka Akira
Hidetoshi Tachibana
Yasukazu Sato
Yasushi Kawasaki
Takeshi Sekine
Akaoka Akira
Hidetoshi Tachibana