Title:
シート貼付装置およびシート貼付方法
Document Type and Number:
Japanese Patent JP7190272
Kind Code:
B2
Abstract:
To provide a sheet sticking device which can stick a first adhesion sheet to a second adhesion sheet without applying a tensile force to the first adhesion sheet stuck to an adherend as much as possible, and provide a sheet sticking method.SOLUTION: A sheet sticking device comprises: sheet sticking means 10 of sticking a first adhesion sheet AS1 to which an expansible particle SG expanding by being applied with a prescribed energy is added, to a first surface WF1 of an adherend WF; first supporting means 20 of supporting the adherend WF to which the first adhesion sheet AS1 is stuck; second supporting means of supporting a second adhesion sheet, and facing and arranging an adhesion surface of the second adhesion sheet supported by the first supporting means 20 to a second surface WF2; and pressing means 50 of sticking the second surface WF2 of the adherend WF to the adhesion surface of the second adhesion sheet with a pressure. The pressing means 50 sticks the second surface WF2 of the adhered WF to the adhesion surface of the second adhesion sheet with the pressure by expanding the expansible particle SG by applying an energy IR to the first adhesion sheet AS1.SELECTED DRAWING: Figure 1
Inventors:
Yoshiaki Sugishita
Application Number:
JP2018122439A
Publication Date:
December 15, 2022
Filing Date:
June 27, 2018
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683; H01L21/301
Domestic Patent References:
| JP2012222308A | ||||
| JP2013543262A | ||||
| JP2012033636A | ||||
| JP6184504A |
Attorney, Agent or Firm:
Takahiro Yamazaki
Takahiro Ogihara
Noriko Hisada
Takahiro Ogihara
Noriko Hisada