Title:
SHEETING HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3785650
Kind Code:
B2
Abstract:
PURPOSE: To provide a sheeting heat treatment apparatus capable of enhancing the in-surface uniformity of an article to be treated by providing heating means only on a side wall of a treatment container.
CONSTITUTION: In a sheeting heat treatment apparatus wherein a sheet of article W to be treated supported on a placement part 16 is heat-treated, there are provided a cylindrical treatment container 14 for which a vacuum is drawn and heating means 26 for heating an article to be treated, and the heating means is provided only on a side wall 14 of the treatment container. Hereby, balancing between the amount of supply of radiation heat for a fine area of the article from the heating means and the amount of heat radiation from the fine area becomes nearly equal over the surface of the article, and hence uniformity of in-surface temperature can be enhanced.
More Like This:
| JPS5265663 | PRODUCTION OF SEMICONDUCTOR DEVICE |
Inventors:
Kimura Hidetoshi
Application Number:
JP8610495A
Publication Date:
June 14, 2006
Filing Date:
March 17, 1995
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/22; H01L21/027; H01L21/205; H01L21/26; H01L21/31; (IPC1-7): H01L21/22; H01L21/205; H01L21/26; H01L21/027; H01L21/31
Domestic Patent References:
| JP5206047A | ||||
| JP62293622A |
Attorney, Agent or Firm:
Akihiro Asai
Previous Patent: LIQUID IMPREGNATING DEVICE, AND LIQUID IMPREGNATING METHOD
Next Patent: WASHING/DRYING MACHINE
Next Patent: WASHING/DRYING MACHINE