Title:
炭化ケイ素焼結体とその製造方法
Document Type and Number:
Japanese Patent JP5397753
Kind Code:
B2
Inventors:
Satoshi Nishimura
Lee Jinshi
Hidehiko Tanaka
Lee Se-sung
Naoto Hirosaki
Lee Jinshi
Hidehiko Tanaka
Lee Se-sung
Naoto Hirosaki
Application Number:
JP2009111679A
Publication Date:
January 22, 2014
Filing Date:
May 01, 2009
Export Citation:
Assignee:
National Institute for Materials Science
International Classes:
C04B35/565; H01L21/683
Domestic Patent References:
| JP8239270A | ||||
| JP58091065A | ||||
| JP2001019550A | ||||
| JP2007238382A |