炭化珪素半導体装置およびその製造方法

Title:

炭化珪素半導体装置およびその製造方法

Document Type and Number:

Japanese Patent JP5396953

Kind Code:

B2

Inventors:

Giant Suzuki
Eiichi Okuno
Yamamoto Kensaku
Toshimasa Yamamoto
Hideo Matsuki
Shinichiro Miyahara

Application Number:

JP2009067930A

Publication Date:

January 22, 2014

Filing Date:

March 19, 2009

Export Citation:

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Assignee:

株式会社デンソー

International Classes:

H01L27/04; H01L21/329; H01L21/336; H01L21/8234; H01L27/06; H01L27/088; H01L29/06; H01L29/12; H01L29/47; H01L29/78; H01L29/872

Domestic Patent References:

JP8204179A
JP2007258742A
JP11074524A
JP2005353964A
JP2002373989A

Attorney, Agent or Firm:

Yoji Ito
Takahiro Miura
Fumihiro Mizuno

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