Title:
炭化珪素単結晶の製造装置
Document Type and Number:
Japanese Patent JP6376027
Kind Code:
B2
Inventors:
Kimura Ren
Makoto Harada
Makoto Harada
Application Number:
JP2015079188A
Publication Date:
August 22, 2018
Filing Date:
April 08, 2015
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/36
Domestic Patent References:
| JP2004131376A | ||||
| JP2014024705A | ||||
| JP2011213563A | ||||
| JP2014024704A | ||||
| JP2011243640A | ||||
| JP2007326743A | ||||
| JP2008290885A |
Foreign References:
| WO1999014405A1 |
Attorney, Agent or Firm:
Fukami patent office
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