シリコン加熱炉 - Theos Co., Ltd.

Title:

シリコン加熱炉

Document Type and Number:

Japanese Patent JP4399026

Kind Code:

B2

Abstract:

The silicon heating furnace (10) is constructed by combining two semi-cylindrical furnaces (26a),(26b). Each of the semi-cylindrical furnaces (26a), (26b) has a semi-cylindrical housing (34), an insulator (36), heaters (38), and an isothermal material (42). Radial direction separation preventing members (44) are arranged in inner side of both ends of circumferential direction of the housing (34) to prevent a separation of the insulator (36) to radial direction. End face of circumferential direction covers (46) are fixed on the radial direction separation preventing members (44) to cover the end faces of circumferential direction (36a) of the insulator (36). Cooling pipes for end faces of circumferential direction (48) through which cooling water passed are arranged between the end faces of circumferential direction (36a) of the insulator (36) and the end face of circumferential direction covers (46).

Inventors:

Go Murai
Toshinori Konaka

Application Number:

JP2009526283A

Publication Date:

January 13, 2010

Filing Date:

August 06, 2007

Export Citation:

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