シリコン製造装置 - Tokuyama Corporation

Title:

シリコン製造装置

Document Type and Number:

Japanese Patent JP4261289

Kind Code:

B2

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Inventors:

Junichiro Nakajima
Opened Oda

Application Number:

JP2003298642A

Publication Date:

April 30, 2009

Filing Date:

August 22, 2003

Export Citation:

Assignee:

Tokuyama Corporation

International Classes:

C01B33/035; F27B17/00; F27D11/06

Domestic Patent References:

Foreign References:

WO1992000245A1
WO2002100777A1

Attorney, Agent or Firm:

Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki

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