Title:
ケイ素ポリマー、膜形成用組成物および絶縁膜形成用材料
Document Type and Number:
Japanese Patent JP4507377
Kind Code:
B2
Inventors:
Xu Eihide
Nishikawa General Rules
Kinji Yamada
Nishikawa General Rules
Kinji Yamada
Application Number:
JP2000289836A
Publication Date:
July 21, 2010
Filing Date:
September 25, 2000
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08G77/60; C08L83/04; C08L83/16; C09D183/02; C09D183/04; C09D183/14; C09D183/16; H01L21/312; H01L21/316
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