Title:
シリコン粉回収装置
Document Type and Number:
Japanese Patent JP7157605
Kind Code:
B2
Abstract:
To enable silicon powder containing liquid to be dried without using a heater.SOLUTION: An apparatus 1 for recovering silicon powder comprises: means 3 for extracting silicon powder P containing liquid from effluent L in a liquid tank 2; a belt 51 for conveying the extracted silicon powder P placed thereon; and drying means 6 for removing the liquid from the silicon powder P being conveyed. The drying means 6 includes: a drying box 60 having a vent path 600 which encloses an upper surface of the conveyer belt 51, and extends in a conveying direction so that air flows through the vent path; and means 61 for forming air turbulence toward the conveying direction in the drying box 60. The air turbulence forming means 61 includes: protrusions 611 disposed on a lower surface of a top plate 603 of the drying box 60; an air supply 612 for supplying air through one end into the drying box 60; and an exhaust 613 for exhausting the air through the other end into the outside of the drying box 60. Air flowing in the conveying direction through the vent path 600 is caused to be air turbulence by the protrusions 611. Spraying the air turbulence onto the silicon powder P containing liquid dries the silicon powder P, and the dried silicon powder is recovered.SELECTED DRAWING: Figure 1
Inventors:
Sugiyama Satoshi
Application Number:
JP2018180035A
Publication Date:
October 20, 2022
Filing Date:
September 26, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/12; B03C5/00; B03C5/02; B24B57/02; F26B3/04; F26B17/04; F26B21/00
Domestic Patent References:
| JP2016049506A | ||||
| JP48021990B1 | ||||
| JP2002333271A |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office