Title:
シリコン加工粉回収方法及び装置
Document Type and Number:
Japanese Patent JP5807185
Kind Code:
B2
Inventors:
Yoshio Yamada
Masashi Okamoto
Shogo Utsumi
Masashi Okamoto
Shogo Utsumi
Application Number:
JP2011143282A
Publication Date:
November 10, 2015
Filing Date:
June 28, 2011
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
B23Q11/00; B23Q11/10; B24B27/06; B28D5/04; B28D7/02; H01L21/304
Domestic Patent References:
| JP11347909A | ||||
| JP2003326449A | ||||
| JP63197038U | ||||
| JP2007301676A | ||||
| JP2003220553A |
Attorney, Agent or Firm:
Mitsuo Tanaka
Samejima Mutsumi
Mitsuo Wada
Samejima Mutsumi
Mitsuo Wada