To provide a method of simulating evaluation for simulation of macro phenomena wherein highly accurate results of arithmetic operation are obtained through a simple process.

A method of simulating evaluation is for the characteristics of semiconductor devices that are determined based on a plurality of parameters. This method includes a step S1 wherein semiconductor device samples are prepared; a step S2 wherein the physical quantities of these samples are measured under specific conditions; a step S4 wherein simulating calculation is made with one substitute parameter substituted for a plurality of parameters or a varying parameter, and the value for the substitute parameter is varied to determine a substitute parameter value most approximate to measured value; and a step S5 wherein simulating calculation is made under conditions other than the specific ones using the determined substitute parameter.