複数枚の基板への蒸着被膜の同時形成方法および搬送トレイ

Title:

複数枚の基板への蒸着被膜の同時形成方法および搬送トレイ

Document Type and Number:

Japanese Patent JP4516870

Kind Code:

B2

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Inventors:

Eiichi Iijima
Toshiyuki Koizumi
Minoru Yamane

Application Number:

JP2005084628A

Publication Date:

August 04, 2010

Filing Date:

March 23, 2005

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

C23C14/24; H01J9/02; H01J11/02; H01J11/22; H01J11/34; H01J11/40

Domestic Patent References:

Attorney, Agent or Firm:

Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida

Previous Patent: JPS4516869

Next Patent: アクリル系低温焼成バインダー