Title:
SIMULTANEOUS SELECTION EXCITATION PL EVALUATION METHOD
Document Type and Number:
Japanese Patent JPH04310828
Kind Code:
A
Abstract:
PURPOSE:To obtain each photoluminescence spectrum rapidly under same conditions and a detailed information on each level by performing excitation with two lights with a different wavelength when measuring photoluminescence for a deep level within a band gap of a semiconductor. CONSTITUTION:Both lights lambda1 and lambda2 are allowed to hit against a sample 4 using two lasers lambda1 and lambda2 with a different wavelength for a light source. The light lambda2 is blocked by a chopper 3. A PL spectrum for a light with lambda2 is obtained by amplifying by a lock-in amplifier 8 a signal regarding the PL light intensity which is obtained through a spectrometer 6 and a detector 7 in synchronization with a signal when the chopper 3 is opened. A PL signal for a light with lambda1 is integrated by a box car integrator 9 which opens an input gate for a short time in synchronization with a signal when the chopper 3 is closed, thus obtaining the PL spectrum for lambda1.
Inventors:
SAKURADA TAKASHI
NISHINE SHIRO
NISHINE SHIRO
Application Number:
JP10487791A
Publication Date:
November 02, 1992
Filing Date:
April 09, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
G01J3/427; G01N21/64; (IPC1-7): G01J3/427; G01N21/64
Attorney, Agent or Firm:
Shigeki Kawase