Title:
SINGLE CHIP INTEGRATED TYPE MULTICHANNEL MAGNETOMETRIC SENSOR
Document Type and Number:
Japanese Patent JP2006349496
Kind Code:
A
Abstract:
To provide a single chip integrated type multichannel magnetometric sensor setting a magnetic measurement point with an accurate pitch and suppressing thermal noise.
A plurality of SQUID sensors 10 including a pick up coil 1, a Josephson junction 2, a shunt resistor 3, a damping resistor 4, and a feed back coil 5 are formed on one substrate 11 in a two-dimensional array by a semiconductor thin film process. This is suitable for magnetoencephalo and magnetocardio measurement of a small animal.
Inventors:
KAWAI ATSUSHI
Application Number:
JP2005175817A
Publication Date:
December 28, 2006
Filing Date:
June 16, 2005
Export Citation:
Assignee:
KANAZAWA INST OF TECHNOLOGY
International Classes:
G01R33/035; H01L39/22
Domestic Patent References:
JP2002094132A | 2002-03-29 | |||
JPH11312830A | 1999-11-09 | |||
JPH08236824A | 1996-09-13 | |||
JPH06204576A | 1994-07-22 | |||
JPH0499979A | 1992-03-31 | |||
JP2002014150A | 2002-01-18 | |||
JPH08313609A | 1996-11-29 |
Attorney, Agent or Firm:
Ari Chika Genshiro
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