PURPOSE: To provide a single crystal pulling apparatus which enables simultaneous production of plural single crystals and efficient massproduction through simultaneos pulling of the crystals being turned from growth solutions respectively arranged in the crucible by types.
CONSTITUTION: A given base material for crystalization is placed into a crucible 13 in a reactor 11. After an exhaustion down to about 10-2 to 10-3 Torr as shown by 11b, inert gas such as Ar is introduced. Then, the material in the crucible 13 is heated 12 until it is turned to a crystalization solution and retained at a given temperature. Subsequently, with a travelling base 21 driven downward, respective retaining devices 18a to 18d are lowered together with the shafts 19a to 19d whereby seed crystals 17 for growth is emmersed into the solution 16. Simultaneously, with the rotation of a rotating shaft 24, the shafts 19a to 19d are rotated together through gears 25 and 26a to 26d so that the crystals 17 turn properly. Then, with the base 21 driven upward, the crystals are pulled at a given rate rotating the retaining devices 18a to 18d. In this manner, four single crystals can be made to grow on the respective seed crystals 17 simultaneously.
TERAJIMA KAZUTAKA