PURPOSE: To correctly evaluate the skin quality of a metallic thin skin by installing each electrode which provides only low diffusivity to metallic atoms consisting of the metallic thin skin as compared with the metallic thin skin.

CONSTITUTION: Electrodes E1 and E2 which provide only low diffusivity to Al atoms consisting of a thin-film 1 as compared with the thin film 1, are installed for example, at the positions P1 and P2 of the metallic thin film 1 composed of Al. When the thin film 1 is composed of Al, electrodes E1 and E2 shall be made out of a high melting point metal such as Ti, W and the like or their nitrides. Let DC current which is sufficiently and comparatively high in current density (approximately 106 to 107 when the thin film is made of Al) in such a way that electromigration is caused from a power supply (constant current power supply) to the inside of the thin film, flow in the thin film by using the electrodes E1 and E2, change in a resistance value between the electrodes E1 and E2 is measured by an ohm-meter RM, so that the quality of the thin film 1 is thereby evaluated by using the result of the aforesaid measurement.