Title:
SLIT COATER
Document Type and Number:
Japanese Patent JP2003170098
Kind Code:
A
Abstract:
To provide a slit coater capable of uniformly coating the surface of a substrate plate with a viscous material.
The slit coater is equipped with a nozzle 12 having a slit-like discharge orifice for applying a treatment liquid R to the surface of the substrate plate W placed on a stage 11 and a pump 15 for supplying the treatment liquid R to the nozzle 12. When the treatment liquid R is applied to the predetermined position of the substrate plate W while relatively moving the nozzle 12 and the substrate plate W by a moving mechanism not shown in the drawing, the treatment liquid R is held at a predetermined temperature by controlling the temperatures of both of the nozzle 12 and the pump 15 or the like by a heat exchange means.
Inventors:
NAKAMURA MASAYA
Application Number:
JP2001372560A
Publication Date:
June 17, 2003
Filing Date:
December 06, 2001
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G03F7/16; B05C5/02; C03C17/00; G02F1/1333; H01L21/027; (IPC1-7): B05C5/02; C03C17/00; G02F1/1333; G03F7/16; H01L21/027
Attorney, Agent or Firm:
Toshifumi Kita (1 person outside)